For a given n-MOS capacitor with substrate doping of NA=1017 cm−3, oxide thickness 20 nm, εox= 3.9 εo the values of oxide capacitance and flat band capacitance are respectively given as
(use εo = 8.85×10−14 F cm−1):1
142 nF/cm2 and 172 nF/cm2
2
172 nF/cm2 and 142 nF/cm2
3
71 nF/cm2 and 86 nF/cm2
4
86 nF/cm2 and 71 nF/cm2