Which of the following statements about MEMS foundries are correct?
1. MEMS foundries use the same tools as IC fabrication.
2. MEMS production is simpler and faster than IC fabrication.
3. MEMS structures are typically 3D while ICs are 2D.
1
1 and 2 only
2
1 and 3 only
3
2 and 3 only
4
1, 2, and 3