The sequence of first to last step involved in a typical silicon gate n - MOS transistor is

(A) Gate oxidation

(B) Contact cuts

(C) Patterning SiO2 layer

(D) Implant or diffusion

(E) Patterning of aluminium layer

Choose the correct answer from the options given below:

(1) (C), (D), (A), (B), (E)

(2) (B), (D), (A), (C), (E)

(3) (C), (A), (D), (B), (E)

(4) (B), (A), (D), (E), (C)

1
1
2
2
3
3
4
4

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